JPH0233259U - - Google Patents
Info
- Publication number
- JPH0233259U JPH0233259U JP10956088U JP10956088U JPH0233259U JP H0233259 U JPH0233259 U JP H0233259U JP 10956088 U JP10956088 U JP 10956088U JP 10956088 U JP10956088 U JP 10956088U JP H0233259 U JPH0233259 U JP H0233259U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- introduction pipe
- plate
- gas introduction
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 4
- 239000012495 reaction gas Substances 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10956088U JPH0233259U (en]) | 1988-08-23 | 1988-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10956088U JPH0233259U (en]) | 1988-08-23 | 1988-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0233259U true JPH0233259U (en]) | 1990-03-01 |
Family
ID=31345916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10956088U Pending JPH0233259U (en]) | 1988-08-23 | 1988-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233259U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018535914A (ja) * | 2015-10-30 | 2018-12-06 | コーニング インコーポレイテッド | ３ｄ形状のガラス系物品、それを製造する方法及び装置 |
-
1988
- 1988-08-23 JP JP10956088U patent/JPH0233259U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018535914A (ja) * | 2015-10-30 | 2018-12-06 | コーニング インコーポレイテッド | ３ｄ形状のガラス系物品、それを製造する方法及び装置 |